ENME 472 - Materials and Processes for Micro/Nanoscale Systems (MEMS)

(3.00)

A fundamental course presenting key topics in materials and processing for the design and manufacture of micro and nano scale systems often called microelectromechanical systems (MEMS). Students will focus on understanding materials and microfabrication technologies commonly employed in these small scale systems. Material properties, parameters and their relationship with microfabrication processes, length scale and applications are discussed with regards to elastic and inelastic deformation, fracture, residual stress, fatigue, creep, adhesion, and stiction. Case studies on devices for sensing and actuation applications will be addressed to connect the course topics. Recommended Preparation: ENME 301, ENME 220

Course ID: 100286
Consent: No Special Consent Required
Components: Lecture